SEOIL E&M is doing the design, manufacture, and sale of the canister that uses the
infrastructure technology related to level control systems.
The canister is a special container for precursors, which can be used for the semiconductor manufacturing process.
- ALD, CVD Precursor Canister.
- We can provide to meet your needs, such as the type that can check the remaining amount using various level sensors, Float type, Ultrasonic type, continuous level sensor type and Point level type.
- Features & Advantages
EP polished 316L stainless steel for all wetted surfaceM
Working Press : ≤0.7MPa
Leak Check Condition : <1E-9Pa · ㎥/s [He Leak Check]
VCR, UPG connections for inlet, outlet and refill port
Air-tight Metal C-seals prevent moisture permeation and contamination.
Canister Size [1L, 2L, 4L, 5G Possible to Customize]